Entegris Introduces XCDA Reticle Purge Gas Purification System

Chaska, MN - Entegris Inc. recently introduced its Extreme Clean Dry Air (XCDA) gas purification system for use as a safer and more cost-effective alternative to conventional nitrogen gas purging in reticle pods and stockers. XCDA purified clean dry air is production-proven in hundreds of scanner lens purge systems worldwide, is as chemically clean – and about 40 percent less expensive than house nitrogen, and has none of the asphyxiation risks associated with continuous nitrogen purge, claims the company.

"Our XCDA reticle purge gas supply system offers our customers a safer and more economical means of purging critical mask storage environments with ultra high purity gas," said Devon Kinkead, vice president and general manager, gas microcontamination, Entegris. "Our lithography production-proven XCDA system is the perfect ultra-pure gas source to extend reticle life, a major cost driver for our customers."

The XCDA purification system has been production proven in hundreds of photolithography systems since being introduced in 2000. The dual-bed, self-regenerating design purifiers house clean dry air to maintain a continuous flow of ultra-pure gas. Entegris recently reached an industry milestone by surpassing its 300th installation.

SOURCE: ENTEGRIS Inc.